The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Jul. 20, 2021
Tokyo Electron Limited, Tokyo, JP;
Toshiyuki Fukumoto, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A deposition-condition output device includes a first calculating unit that calculates a first deposition condition under which a target result of deposition is obtained, based on a liner regression model applied to a deposition process by a deposition apparatus. The deposition-condition output device includes a second calculating unit that calculates a second deposition condition under which the target result of the deposition is obtained, based on a nonlinear regression model applied to the deposition process by the deposition apparatus, the second deposition condition being calculated by estimating a confidence interval of a predicted result of the deposition. The deposition-condition output device includes a selector that selects either the first deposition condition or the second deposition condition, based on whether the confidence interval of the predicted result estimated under the calculated second deposition condition satisfies a predetermined condition.