The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Nov. 29, 2021
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Ramani Pichumani, Palo Alto, CA (US);
Thomas Korb, Schwaebisch Gmuend, DE;
Dmitry Klochkov, Schwaebisch Gmuend, DE;
Jens Timo Neumann, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); G06N 20/20 (2019.01); G06T 7/11 (2017.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G06N 20/20 (2019.01); G06T 7/11 (2017.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01);
Abstract
Methods and evaluation devices for evaluating 3D data of a device under inspection are provided. A first machine learning logic detects target objects, and a second machine learning logic provides a voxel segmentation for the target objects. Based on the segmented voxels, a transformation to feature space is performed to obtain measurement results.