The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 19, 2024
Filed:
Oct. 31, 2019
Applicant:
The Regents of the University of California, Oakland, CA (US);
Inventors:
Takeshi Kamikawa, Kyoto, JP;
Srinivas Gandrothula, Santa Barbara, CA (US);
Assignee:
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 25/04 (2006.01); C30B 25/18 (2006.01); C30B 29/40 (2006.01); H01L 21/78 (2006.01); H01L 29/06 (2006.01); H01L 29/20 (2006.01); H01L 29/40 (2006.01); H01L 33/00 (2010.01); H01L 33/24 (2010.01); H01L 33/32 (2010.01); H01S 5/02 (2006.01); H01S 5/22 (2006.01); H01S 5/343 (2006.01);
U.S. Cl.
CPC ...
C30B 25/04 (2013.01); C30B 25/18 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); H01L 21/02389 (2013.01); H01L 21/0242 (2013.01); H01L 21/0254 (2013.01); H01L 21/02647 (2013.01); H01L 21/7806 (2013.01); H01L 29/0657 (2013.01); H01L 29/2003 (2013.01); H01L 33/007 (2013.01); H01L 33/24 (2013.01); H01L 33/32 (2013.01); H01S 5/0202 (2013.01); H01S 5/22 (2013.01); H01S 5/34333 (2013.01); H01S 2304/12 (2013.01);
Abstract
A method for obtaining a smooth surface of an epi-layer with epitaxial lateral overgrowth. The method does not use mis-cut orientations and does not suppress the occurrence of pyramidal hillocks, but instead embeds the pyramidal hillocks in the epi-layer. A growth restrict mask is used to limit the expansion of the pyramidal hillocks in a lateral direction. The surface of the epi-layer becomes extremely smooth due to the disappearance of the pyramidal hillocks.