logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12142512 B1

PDFFull Text
Date of Patent:
Nov. 12, 2024

Filed:

Feb. 16, 2022

Vacuum apparatus

Applicant:

Nuflare Technology, Inc., Yokohama, JP;

Inventors:

Yoshiaki Shinohara, Hiratsuka, JP;

Michihiro Kawaguchi, Mishima, JP;

Assignee:

NUFLARE TECHNOLOGY, INC., Yokohama, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

James Keenan

Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/677 (2006.01); G03F 7/00 (2006.01); H01J 37/18 (2006.01); H01J 37/20 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68707 (2013.01); H01L 21/67742 (2013.01); H01L 21/67748 (2013.01); H01L 21/68757 (2013.01); G03F 7/70733 (2013.01); H01J 37/185 (2013.01); H01J 37/20 (2013.01); H01J 37/3174 (2013.01); H01J 2237/2001 (2013.01); H01J 2237/204 (2013.01);
Abstract

A vacuum apparatus includes: a chamber; and a transfer robot transferring a processing object into the chamber, wherein the transfer robot includes an arm portion, a support portion provided at a tip of the arm portion and having a lower thermal conductivity than the arm portion, a plate provided between the support portion and the processing object and having a higher thermal conductivity than the support portion, and a support pad provided on the support portion and supporting the processing object by being in contact with the processing object while separating the processing object from the plate, a contact region allowing the support portion and the plate to be in contact with each other therein and a space region separated the support portion and the plate from each other are provided between the support portion and the plate, and the plate includes a projection configured as the contact region.

Find Patent Forward Citations

Loading…