The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 12, 2024

Filed:

Oct. 12, 2021
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Sushant S. Koshti, Sunnyvale, CA (US);

Paul B. Reuter, Austin, TX (US);

David Phillips, Austin, TX (US);

Jacob Newman, Palo Alto, CA (US);

Andrew J. Constant, Cupertino, CA (US);

Michael R. Rice, Pleasonton, CA (US);

Shay Assaf, Santa Clara, CA (US);

Srinivas Poshatrahalli Gopalakrishna, Bangalore, IN;

Devendra Channappa Holeyannavar, Bangalore, IN;

Douglas B. Baumgarten, Round Rock, TX (US);

Arunkumar Ramachandraiah, Bengaluru, IN;

Narayanan Ramachandran, Bangalore, IN;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 1/04 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67778 (2013.01); B65G 1/0407 (2013.01); B65G 1/0485 (2013.01); H01L 21/67775 (2013.01); H01L 21/68707 (2013.01);
Abstract

A factory interface for an electronic device manufacturing system can include a load lock disposed within the interior volume of a factory interface and a factory interface robot disposed within the interior volume of the factory interface. The factory interface robot can be configured to transfer substrates between a first set of substrate carriers and the first load lock. The factory interface robot can comprise a vertical tower, a plurality of links, and an end effector.


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