The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Mar. 02, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Devendra Channappa Holeyannavar, Bangalore, IN;
Sandesh Doddamane Ramappa, Bangalore, IN;
Dean C. Hruzek, Cedar Park, TX (US);
Michael R. Rice, Pleasanton, CA (US);
Jeffrey A. Brodine, Los Gatos, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67178 (2013.01); H01L 21/67184 (2013.01); H01L 21/6719 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67379 (2013.01); H01L 21/67389 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01); H01L 21/67207 (2013.01);
Abstract
A platform is of a side storage pod. The platform includes an upper surface and kinematic pins extending from the upper surface within a chamber of the side storage pod to engage a lower surface of a side storage container in the chamber to level the side storage container in the chamber.