The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Dec. 07, 2022
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Ta-Wei Lin, Minxiong Township, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Abstract
Various embodiments of the present disclosure are directed towards a semiconductor device. The semiconductor device includes a gate electrode separated from a substrate by a gate dielectric. The gate electrode has one or more interior surfaces that form a recess within the gate electrode. A dielectric layer is disposed over the substrate and laterally surrounds the gate electrode. A dishing prevention structure is disposed within the recess. The dishing prevention structure is both vertically separated from the gate dielectric and laterally separated from the dielectric layer by the gate electrode. The dishing prevention structure continuously extends between outermost sidewalls of the dishing prevention structure as viewed along a cross-sectional view extending through a center of the recess.