The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Nov. 17, 2021
Advanced Energy Industries, Inc., Fort Collins, CO (US);
Daniel Carter, Fort Collins, CO (US);
Victor Brouk, Fort Collins, CO (US);
Daniel J. Hoffman, Fort Collins, CO (US);
Advanced Energy Industries, Inc., Denver, CO (US);
Abstract
Systems, methods and apparatus for applying a periodic voltage function are disclosed. An exemplary method comprises applying a modified periodic voltage function to an electrical node and monitoring the modified periodic voltage function over multiple cycles to monitor a relationship to represent a status of a plasma process or the plasma processing chamber, where Irepresents a controllable ion compensation current, D is a unitless value, represents a portion of the modified periodic voltage function that includes a negative voltage ramp, and Cis an effective capacitance including a capacitance of a substrate support.