The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Oct. 08, 2020
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Shawn D. Eggum, Lonsdale, MN (US);
Anthony M. Tieben, Belle Plaine, MN (US);
Brian Wiseman, Glencoe, MN (US);
Russ V. Raschke, Chanhassen, MN (US);
Huaping Wang, Eden Prairie, MN (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/66 (2012.01); B65D 85/48 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
G03F 1/66 (2013.01); B65D 85/48 (2013.01); H01L 21/67359 (2013.01); H01L 21/67376 (2013.01); H01L 21/67386 (2013.01);
Abstract
A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.