The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Jan. 25, 2023
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Jinsang Kim, Ann Arbor, MI (US);
Grace Chen, Los Gatos, CA (US);
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/91 (2006.01); G01N 21/64 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01N 21/91 (2013.01); G01N 21/643 (2013.01); G01N 21/9501 (2013.01); G01N 2021/6439 (2013.01); G01N 2021/646 (2013.01);
Abstract
A photoluminescent material can be applied to part of a substrate as part of substrate inspection. The photoluminescent material includes a conjugated polymer having a coiled macroscopic molecular shape and a meta-linkage or an ortho-linkage. The substrate is imaged using an inspection system. The conjugated polymer can be, for example, poly(m-phenylene ethynylene) (PPE) or poly(para-phenylene vinylene) (PPV).