The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Apr. 11, 2023
Boron nitride layer, apparatus including the same, and method of fabricating the boron nitride layer
Applicants:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Unist (Ulsan National Institute of Science and Technology), Ulsan, KR;
Inventors:
Changseok Lee, Gwacheon-si, KR;
Hyeonsuk Shin, Ulsan, KR;
Hyeonjin Shin, Suwon-si, KR;
Seokmo Hong, Ulsan, KR;
Minhyun Lee, Suwon-si, KR;
Seunggeol Nam, Suwon-si, KR;
Kyungyeol Ma, Ulsan, KR;
Assignees:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
UNIST (ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY), Ulsan, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 29/38 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C30B 29/38 (2013.01); H01L 21/02172 (2013.01); H01L 21/02252 (2013.01); H01L 21/02293 (2013.01);
Abstract
A boron nitride layer and a method of fabricating the same are provided. The boron nitride layer includes a boron nitride compound and has a dielectric constant of about 2.5 or less at an operating frequency of 100 kHz.