The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Oct. 25, 2019
Taiyo Nippon Sanso Corporation, Tokyo, JP;
Akira Yamaguchi, Musashino, JP;
Tadanobu Arimura, Tsukuba, JP;
TAIYO NIPPON SANSO CORPORATION, Tokyo, JP;
Abstract
The object of the present invention is to provide a cleaning apparatus for a component of a semiconductor production apparatus, which is capable of preventing the attachment of reaction products into the cleaning processing furnace by a simple structure, the present invention provides a cleaning apparatus () for a component of a semiconductor production apparatus including: a cleaning processing furnace () which is configured to house the component () of a semiconductor production apparatus; a heating device (); a gas introduction pipe (); a gas discharge pipe (); a decompression device (); a first temperature control device (); a second temperature control device (); and a purge gas supply device ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile