The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Dec. 05, 2023
Applicant:
Fujimi Incorporated, Aichi, JP;
Inventors:
Yuichiro Nakagai, Aichi, JP;
Yasuaki Ito, Aichi, JP;
Hiroyuki Oda, Aichi, JP;
Shogaku Ide, Aichi, JP;
Shinichiro Takami, Aichi, JP;
Assignee:
FUJIMI INCORPORATED, Aichi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09G 1/02 (2006.01); B24B 37/04 (2012.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); B24B 37/044 (2013.01); H01L 21/02013 (2013.01);
Abstract
Provided is a polishing composition containing an abrasive, permanganate, an aluminum salt, and water. In the polishing composition, a relation of a content W1 [% by weight] of the abrasive, a concentration C1 [mM] of the permanganate, and a concentration C2 [mM] of the aluminum salt satisfies at least one condition of the following conditions [A], [B], and [C]:satisfying both of 500≤(1/1) and 0.04≤(2/1); [A]satisfying both of 200≤(1/√(1)) and 8≤2; and [B]satisfying both of 500≤(1/1) and 8≤2. [C]