The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2024
Filed:
Feb. 09, 2023
Screen Holdings Co., Ltd., Kyoto, JP;
Toru Endo, Kyoto, JP;
Yuta Yamanouchi, Kyoto, JP;
Yuta Segawa, Kyoto, JP;
Rikuta Aoki, Kyoto, JP;
Tsung Ju Lin, Kyoto, JP;
Jun Sawashima, Kyoto, JP;
SCREEN Holdings Co., Ltd., , JP;
Abstract
A substrate processing apparatus includes a chemical liquid nozzlethat includes a chemical liquid discharge portdischarging a chemical liquid in a chemical liquid discharge direction D, inclined with respect to an upper surface of a substrate W, toward a target position Pwithin the upper surface of the substrate W, a spray shieldthat includes a shield surfacedirectly opposing the upper surface of the substrate W and with which the shield surfaceoverlaps with the target position Pin plan view and, when the chemical liquid nozzleand the shield surfaceare viewed from below, all portions of the chemical liquid discharge portare disposed at an outer side of an outer edge of the shield surfaceor on the outer edge of the shield surface, and a nozzle moving unitthat moves the chemical liquid nozzletogether with the spray shield