The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Jan. 25, 2022
Applicant:
Enkris Semiconductor, Inc., Suzhou, CN;
Inventor:
Peng Xiang, Suzhou, CN;
Assignee:
ENKRIS SEMICONDUCTOR, INC., Suzhou, CN;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67379 (2013.01); H01L 21/67306 (2013.01);
Abstract
Disclosed is a graphite plate to solve a problem of poor performance uniformity of an epitaxial wafer obtained during carrying on epitaxial growth of material using the graphite plate. A graphite plate includes: a graphite plate body, includes a carrying recess and a recess located on one side of the carrying recess away from a central point of the graphite plate body; and a stopper, which is embedded in the recess in a matching manner, and the stopper protrudes from the bottom surface of the carrying recess to form a limiting structure.