The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Sep. 30, 2021
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
Cheng Chi, Jersey City, NJ (US);
Takashi Ando, Eastchester, NY (US);
Reinaldo Vega, Mahopac, NY (US);
Praneet Adusumilli, Somerset, NJ (US);
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 1/36 (2012.01); G03F 1/38 (2012.01); G03F 1/92 (2012.01);
U.S. Cl.
CPC ...
G03F 1/36 (2013.01); G03F 1/38 (2013.01); G03F 1/92 (2013.01);
Abstract
A memory device is provided. The memory device includes a main feature disposed beneath a surface of a photolithographic mask. The memory device further includes at least one Sub-Resolution Assistant Feature (SRAF) proximate to the main feature beneath the surface. The main feature has an electrical conductivity based on an area relationship with the at least one SRAF.