The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Oct. 26, 2022
Nuflare Technology, Inc., Yokohama, JP;
Masaya Takeda, Yokohama, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
According to an embodiment, an inspection apparatus includes: a stage; an illumination optical system; an imaging optical system including a sensor that detects a focal position; a detection circuit configured to detect a focal position signal of the light; a setting circuit configured to set a first focus offset value of a first region based on a result obtained by shifting, in an advancement direction of the stage, coordinate data of first focal position data generated based on a result obtained by optically scanning the first region; and a control circuit configured to control a height position of the stage based on the focal position signal and the first focus offset value.