The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Sep. 22, 2021
Disco Corporation, Tokyo, JP;
Satoshi Yamanaka, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A fine adjustment device that is interposed between a table base rotatably supporting a chuck table for holding a workpiece on a holding surface and a base supporting the table base and that adjusts a distance between the table base and the base. The fine adjustment device includes: a support member that has an upper section and an intermediate section and a lower section, with the upper section fixed to the table base and with the intermediate section fixed to the base; an accommodating chamber formed in the support member; a piezoelectric actuator that is accommodated in the accommodating chamber and is capable of contracting and extending in a perpendicular direction; and a contraction-extension structure to have the accommodating chamber contracted and extended in the perpendicular direction.