The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2024
Filed:
Jan. 05, 2022
Applicant:
Disco Corporation, Tokyo, JP;
Inventor:
Yuji Hadano, Tokyo, JP;
Assignee:
DISCO CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/40 (2014.01); B23K 26/06 (2014.01); B23K 26/0622 (2014.01); B23K 26/073 (2006.01); B23K 26/146 (2014.01); B23K 103/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B23K 26/40 (2013.01); B23K 26/0622 (2015.10); B23K 26/0643 (2013.01); B23K 26/0665 (2013.01); B23K 26/0736 (2013.01); B23K 26/146 (2015.10); H01L 21/67092 (2013.01); B23K 2103/56 (2018.08);
Abstract
A laser beam application unit of a laser processing machine includes a laser oscillator, a spot shaper, a polygon mirror, and a condenser. The laser oscillator emits a pulsed laser beam. The spot shaper is configured to shape a spot profile of the pulsed laser beam emitted from the laser oscillator such that the spot profile becomes long in a Y-axis direction and short in an X-axis direction. The polygon mirror disperses the spot, which has been shaped by the spot shaper, in the X-axis direction. The condenser focuses the pulsed laser beam, which has been dispersed by the polygon mirror, on a workpiece held on a chuck table.