The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2024

Filed:

Jan. 11, 2021
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Vladimir Odnoblyudov, Eagle, ID (US);

Scott D. Schellhammer, Meridian, ID (US);

Jeremy S. Frei, Boise, ID (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/52 (2010.01); H01L 21/56 (2006.01); H01L 21/683 (2006.01); H01L 21/78 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 33/00 (2010.01); H01L 33/20 (2010.01); H01L 33/44 (2010.01); H01L 33/62 (2010.01); H01S 5/02 (2006.01); H10K 50/84 (2023.01); H10K 50/844 (2023.01); H10K 71/00 (2023.01);
U.S. Cl.
CPC ...
H01L 33/52 (2013.01); H01L 21/561 (2013.01); H01L 21/78 (2013.01); H01L 23/3185 (2013.01); H01L 33/0095 (2013.01); H01L 33/20 (2013.01); H01L 33/44 (2013.01); H01L 33/62 (2013.01); H01S 5/0201 (2013.01); H01L 21/6836 (2013.01); H01L 24/11 (2013.01); H01L 24/13 (2013.01); H01L 24/97 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68377 (2013.01); H01L 2224/1146 (2013.01); H01L 2224/13022 (2013.01); H01L 2224/13124 (2013.01); H01L 2224/13139 (2013.01); H01L 2224/13144 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/97 (2013.01); H01L 2924/12041 (2013.01); H01L 2924/12042 (2013.01); H01L 2924/12044 (2013.01); H01L 2933/005 (2013.01); H01L 2933/0066 (2013.01); H10K 50/84 (2023.02); H10K 50/844 (2023.02); H10K 71/00 (2023.02); H10K 71/851 (2023.02); Y02P 80/30 (2015.11);
Abstract

Etched trenches in a bond material for die singulation, and associated systems and methods are disclosed. A method for solid state transducer device singulation in accordance with one embodiment includes forming a plurality of trenches by etching through a metallic bond material forming a bond between a carrier substrate and a plurality of the dies and singulating the carrier substrate along the trenches to separate the dies. In particular embodiments, the trenches extend into the carrier substrate. In further particular embodiments, the dies are at least partially encapsulated in a dielectric material.


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