The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 29, 2024

Filed:

Feb. 25, 2022
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Norihiko Amikura, Miyagi, JP;

Toshiaki Toyomaki, Miyagi, JP;

Masatomo Kita, Miyagi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 11/00 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01); H01J 37/32 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); B25J 15/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); B25J 9/1697 (2013.01); B25J 11/0095 (2013.01); B25J 13/08 (2013.01); H01J 37/32642 (2013.01); H01J 37/32807 (2013.01); H01L 21/68707 (2013.01); B25J 15/0014 (2013.01); G05B 2219/36433 (2013.01); G05B 2219/39001 (2013.01); H01L 21/67173 (2013.01);
Abstract

According to an aspect of the present disclosure, there is provided a transfer system comprising a transfer robot configured to transfer a transfer target object by an end effector based on an operation instruction, and a controller configured to output the operation instruction to the transfer robot, wherein at least any one of the end effector and the transfer target object has at least any one of a sensor and a camera, the controller calculates a relative position between the end effector and the transfer target object based on at least any one of a detected result of the sensor and a captured result of the camera, and the controller determines a teaching position of the end effector with respect to the transfer target object based on the relative position, and outputs the operation instruction to the transfer robot such that the end effector is disposed at the teaching position.


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