The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Dec. 17, 2021
Asm Ip Holding B.v., Almere, NL;
Tomohiro Arakawa, Sagamihara, JP;
ASM IP Holding B.V., Almere, NL;
Abstract
Examples of a plasma treatment device include an RF generator, a matching box including an input terminal connected with the RF generator, a sensor configured to sense high-frequency electricity, an impedance adjustment circuit, and an output terminal, a matching controller connected with the sensor and configured to control the impedance adjustment circuit, a reactor chamber connected with the output terminal, and a harmonic filter circuit connected with a transmission line between the sensor and the reactor chamber.
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