The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Sep. 15, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Preetham Prahallada Rao, Morgan Hill, CA (US);
Prashanth Kothnur, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 30/27 (2020.01); G06F 18/214 (2023.01); G06N 20/20 (2019.01); H01L 21/67 (2006.01); G06F 111/06 (2020.01);
U.S. Cl.
CPC ...
G06F 30/27 (2020.01); G06F 18/214 (2023.01); G06N 20/20 (2019.01); H01L 21/67011 (2013.01); H01L 21/67248 (2013.01); G06F 2111/06 (2020.01);
Abstract
A method includes measuring a subset of property values within a manufacturing chamber during a process performed on a substrate within the manufacturing chamber. The method further includes determining property values in the manufacturing chamber at locations removed from the locations the measurements are taken. The method further includes performing a corrective action based on the determined properties.