The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Mar. 24, 2021
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventors:
Anuj Pandey, Delhi, IN;
Wing-Shan Ribi Leung, Sunnyvale, CA (US);
Assignee:
KLA Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 30/30 (2020.01); G06F 30/20 (2020.01); G06F 30/31 (2020.01); G06N 3/04 (2023.01);
U.S. Cl.
CPC ...
G06F 30/20 (2020.01); G06F 30/31 (2020.01); G06N 3/04 (2013.01);
Abstract
A device design file and material properties are inputted into a neural network module configured to operate a generative adversarial network. A process parameter is determined based on a device design file and material properties inputs using the generative adversarial network. This can be used to provide process parameters during semiconductor device design or manufacturing.