The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2024
Filed:
Feb. 27, 2020
Applicant:
Jx Nippon Mining & Metals Corporation, Tokyo, JP;
Inventors:
Takahiro Uchida, Ibaraki, JP;
Toru Imori, Tokyo, JP;
Koichi Takemoto, Ibaraki, JP;
Shiro Tsukamoto, Ibaraki, JP;
Assignee:
JX Advanced Metals Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C22C 13/00 (2006.01); B65D 81/20 (2006.01);
U.S. Cl.
CPC ...
C22C 13/00 (2013.01); B65D 81/2007 (2013.01);
Abstract
In the present invention, a high-purity metallic tin suitable for use in an EUV exposure device is provided through use of an oxidation-resistant metallic tin, the oxidation-resistant metallic tin containing 99.995 mass % or more of tin, and unavoidable impurities, and the thickness of an oxide film being 2.0 nm or less when the surface of a cut face of the oxidation-resistant metallic tin is measured by AES.