The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Sep. 26, 2022
Micron Technology, Inc., Boise, ID (US);
Shigeru Sugioka, Higashihiroshima, JP;
Hidenori Yamaguchi, Higashihiroshima, JP;
Noriaki Fujiki, Kawanishi, JP;
Keizo Kawakita, Higashihiroshima, JP;
Raj K. Bansal, Taichung, TW;
Micron Technology, Inc., Boise, ID (US);
Abstract
According to one or more embodiments, a method of manufacturing a semiconductor device including a plurality of main circuit regions arranged in a matrix and a scribe region provided between the main circuit regions is provided. The method includes: forming a first insulating film; forming a low-k film; forming a plurality of penetrating portions penetrating through the low-k film; and forming a second insulating film under low-coverage film-forming conditions to form cavities in the plurality of through-holes.