The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2024
Filed:
Jan. 26, 2021
Cymer, Llc, San Diego, CA (US);
Thomas Dickson Steiger, San Diego, CA (US);
Cymer, LLC, San Diego, CA (US);
Abstract
A light source apparatus () includes: a chamber () having a chamber wall () defining an opening (); and a support apparatus () including a support device () positioned within the opening of the chamber wall. The support device includes: a cup () having an inner surface () configured to retain a movable apparatus and an outer surface () having a first outer diameter; and a plurality of rods () arranged at the outer surface of the cup such that the arrangement of the plurality of rods defines a second outer diameter, the second outer diameter greater than the first outer diameter. The chamber wall is configured to hold the support device such that the chamber wall contacts the plurality of rods when the support device is positioned within the opening of the chamber wall, and the outer surface of the cup does not contact the chamber wall.