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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12123799 B1

PDFFull Text
Date of Patent:
Oct. 22, 2024

Filed:

Nov. 09, 2018

Electrical inspection method

Applicant:

Hamamatsu Photonics K.k., Hamamatsu, JP;

Inventors:

Takashi Kasahara, Hamamatsu, JP;

Katsumi Shibayama, Hamamatsu, JP;

Masaki Hirose, Hamamatsu, JP;

Toshimitsu Kawai, Hamamatsu, JP;

Hiroki Oyama, Hamamatsu, JP;

Yumi Kuramoto, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu, JP;

Attorney:

Faegre Drinker Biddle & Reath LLP

Primary Examiner:

Jie Lei

Int. Cl.
CPC ...
G01M 11/00 (2006.01); G01J 3/02 (2006.01); G01J 3/26 (2006.01); G01R 1/067 (2006.01); G01R 27/26 (2006.01); G01R 31/52 (2020.01); G02B 5/28 (2006.01); G02B 26/00 (2006.01);
U.S. Cl.
CPC ...
G01M 11/00 (2013.01); G01J 3/0243 (2013.01); G01J 3/26 (2013.01); G01R 1/0675 (2013.01); G01R 27/2605 (2013.01); G01R 31/52 (2020.01); G02B 5/28 (2013.01); G02B 26/001 (2013.01);
Abstract

An electrical inspection method includes: a step of preparing a wafer in which a plurality of Fabry-Perot interference filter portions is formed, each of the plurality of Fabry-Perot interference filter portions in which a distance between a first mirror portion and a second mirror portion facing each other varies by an electrostatic force; and a step of inspecting electrical characteristics of each of the plurality of Fabry-Perot interference filter portions.

Find Patent Forward Citations

Kasahara, Takashi. (2024). Electrical inspection method (U.S. Patent No. 12123799). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12123799

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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