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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12121993 B1

PDFFull Text
Date of Patent:
Oct. 22, 2024

Filed:

Dec. 01, 2022

Method of processing workpiece and laser processing apparatus

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Masatoshi Nayuki, Tokyo, JP;

Satoshi Kumazawa, Tokyo, JP;

Keisuke Nishimoto, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer Burns & Crain Ltd.

Primary Examiner:

Philip C Tucker

Assistant Examiner:

Andrew L Swanson

Int. Cl.
CPC ...
B23K 26/20 (2014.01); B23K 26/70 (2014.01); B23K 101/18 (2006.01); B23K 101/40 (2006.01); H01L 21/683 (2006.01); H01L 21/78 (2006.01); H01L 21/782 (2006.01); H01L 21/784 (2006.01); H01L 21/82 (2006.01);
U.S. Cl.
CPC ...
B23K 26/20 (2013.01); B23K 26/702 (2015.10); B23K 2101/18 (2018.08); B23K 2101/40 (2018.08); H01L 21/6835 (2013.01); H01L 21/6836 (2013.01); H01L 21/78 (2013.01); H01L 21/782 (2013.01); H01L 21/784 (2013.01); H01L 21/82 (2013.01);
Abstract

A method of processing a plate-shaped workpiece includes a sheet affixing step of laying a thermocompression bonding sheet on a surface of the workpiece and heating and pressing the thermocompression bonding sheet against the workpiece to affix the thermocompression bonding sheet to the workpiece, a laser beam applying step of applying a laser beam having a wavelength absorbable by the workpiece to another surface of the workpiece along a projected dicing line established thereon, thereby processing the workpiece along the projected dicing line, and a sheet joining step of pressing the thermocompression bonding sheet while reheating the thermocompression bonding sheet to soften the same, so that the thermocompression bonding sheet is joined up by closing dividing grooves or through holes made in the thermocompression bonding sheet when the workpiece is processed in the laser beam applying step.

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