Semiconductor device including channel structure and through electrode, electronic system, and method of forming the same

Abstract

A semiconductor device includes a lower structure including lower wirings. A horizontal wiring layer is disposed on the lower structure while including a horizontal conductive layer, and a horizontal insulating layer extending through the horizontal conductive layer. A stack structure is disposed on the horizontal wiring layer. A channel structure extending into the horizontal wiring layer while extending through the stack structure is provided. A through electrode connected to the lower wirings while extending through the stack structure and the horizontal insulating layer is provided. The stack structure includes insulating layers and electrode layers repeatedly alternately stacked, and an interlayer insulating layer disposed at side surfaces of the insulating layers and the electrode layers. The through electrode includes a first portion extending into the interlayer insulating layer, and a second portion disposed between the first portion and the lower wirings while having a smaller horizontal width than the first portion.