The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Jun. 30, 2020
Asml Netherlands B.v., Veldhoven, NL;
Bas Jansen, Den Bosch, NL;
Koen Martin Willem Jan Bos, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Leende, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Disclosed is a thermo-mechanical actuator () comprising a piezo¬electric module (), the piezo-electric module comprising at least one piezo-electric element (), wherein the thermo-mechanical actuator is configured to: •o receive a thermal actuation signal () for controlling a thermal behaviour of the piezo-electric module, or •o provide a thermal sensing signal () representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: •o receive a mechanical actuation () signal for controlling a mechanical behaviour of the piezo-electric module, or •o provide a mechanical sensing signal () representative of a mechanical state of the piezo-electric module.