The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Sep. 07, 2020
Tokyo Electron Limited, Tokyo, JP;
Kentaro Konishi, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An inspection system includes first and second chiller units which supply first and second heating media controlled to first and second temperatures, respectively, where the second temperature is lower than the first temperature, a stage having a flow passage supplied with a heating medium mixed with the first and the second heating media at a desired mixing ratio, and a controller. The inspection system performs an inspection with respect to a substrate placed on the stage. The controller controls a process of measuring a temperature of the heating medium at an inlet of the flow passage and a temperature of the heating medium at an outlet of the flow passage, and a process of correcting the mixing ratio of the first and second heating media, based on a difference between the temperatures of the heating medium at the inlet and outlet, and a flow rate of the heating medium.