The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2024
Filed:
Nov. 09, 2020
Applicants:
Vg System Limited, Altricham Chesire, GB;
Fei Company, Brno, CZ;
Inventors:
Bryan Barnard, Nutley, GB;
Pavel Stejskal, Brno, CZ;
Assignees:
VG Systems Limited, Cambridge, GB;
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/2273 (2018.01);
U.S. Cl.
CPC ...
G01N 23/2273 (2013.01); G01N 2223/07 (2013.01); G01N 2223/501 (2013.01);
Abstract
A method and apparatus for detection of charged particles in spectroscopy. Charged particles, received from an energy dispersive spectroscopic analyser as a charged particle beam, are accelerated towards a detector. The accelerated charged particles are received at an array of detecting pixels, the array of detecting pixels forming the detector. The charged particles arriving at the detector have a spread in the energy dispersive direction.