Device, method and system to prevent pattern collapse in a semiconductor structure

Abstract

A semiconductor fabrication method, a semiconductor device and a semiconductor module. The method comprises: providing a stack on a substrate, the stack including a plurality of device layers comprising electrically conductive layers; patterning the stack using an etch to form trenches extending therethrough and pillars between the trenches; providing a carbon-containing liner on sidewalls of the trenches; wet cleaning and drying the stack after providing the carbon-containing liner; filling spaces between the pillars with one or more materials; and electrically coupling contact lines to the electrically conductive layers to form the semiconductor device. The carbon-containing liner may include a carbon-doped liner, such as a carbon-doped oxide liner provided by way of atomic layer deposition of an oxide at temperatures between about 100 degrees Celsius to about 300 degree Celsius using carbon as a precursor.