The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Feb. 22, 2022
Applicant:
Imec Vzw, Leuven, BE;
Inventors:
Assignee:
IMEC VZW, Leuven, BE;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/465 (2006.01); H01L 29/24 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0262 (2013.01); H01L 21/02568 (2013.01); H01L 21/02598 (2013.01); H01L 21/02645 (2013.01); H01L 21/465 (2013.01); H01L 29/66969 (2013.01); H01L 21/0242 (2013.01); H01L 29/24 (2013.01);
Abstract
A method for providing a film of one or more monolayers of transition metal dichalcogenides on a substrate is disclosed. The method includes providing a substrate; depositing at least one monolayer of the transition metal dichalcogenides on the substrate; and selectively removing superficial islands on top of the at least one monolayer by thermal etching.