The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Oct. 22, 2019
Asml Holding N.v., Veldhoven, NL;
Mehmet Ali Akbas, Cheshire, CT (US);
Tammo Uitterdijk, Wilton, CT (US);
Christopher John Mason, Newtown, CT (US);
Matthew Lipson, Stamford, CT (US);
David Hart Peterson, Milford, CT (US);
Michael Perry, Thomaston, CT (US);
Peter Helmus, New Milford, CT (US);
Jerry Jianguo Deng, Ridgefield, CT (US);
Damoon Sohrabibabaheidary, Norwalk, CT (US);
ASML Holding N.V., Veldhoven, NL;
Abstract
A method for reducing sticking of an object to a surface used in a lithography process includes receiving, at a control computer, instructions for a tool configured to modify the surface and forming, in a deterministic manner based on the instructions received at the control computer, a modified surface having a furrow and a ridge, wherein the ridge reduces the sticking by reducing a contact surface area of the modified surface. Another apparatus includes a modified surface that includes furrows and ridges forming a reduced contact surface area to reduce a sticking of an object to the modified surface, the ridges having an elastic property that causes the reduced contact surface area to increase when the plurality of ridges is elastically deformed.