The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Jan. 26, 2024
Harbin Institute of Technology, Harbin, CN;
Harbin Institute of Technology, Harbin, CN;
Abstract
Disclosed are a differential dark-field confocal microscopic measurement apparatus and method based on a polarized vector light beam. The apparatus includes a vector polarized illumination light generation module, a light beam scanning illumination module and a differential dark-field confocal imaging module; a half wave plate and a vortex wave plate are regulated to generate radially polarized signal light and azimuthally polarized signal light respectively, and an acousto-optic modulator is controlled to modulate light beams into a pulse form, so that the radially polarized signal light and the azimuthally polarized signal light alternately illuminate during the same period, both of which have a time occupation ratio of 50%, separately. Difference values of scattering signals under separate illumination of the radially polarized signal light and the azimuthally polarized signal light are analyzed, and super-resolution detection imaging can be performed on the three-dimensional distribution information of defects such as subsurface scratches, and abrasion.