The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Nov. 22, 2021
Applicant:
Onto Innovation Inc., Wilmington, MA (US);
Assignee:
ONTO INNOVATION INC., Wilmington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/3185 (2006.01); G01R 1/073 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01); G06F 30/00 (2020.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G01R 31/318511 (2013.01); G01R 31/2642 (2013.01); G01R 31/2831 (2013.01); G01R 31/2886 (2013.01); H01L 22/14 (2013.01); G01R 1/07342 (2013.01); G06F 30/00 (2020.01); H01L 22/34 (2013.01); H01L 2924/00 (2013.01); H01L 2924/0002 (2013.01);
Abstract
Systems and methods for improving substrate fabrication are provided. Subsets of dies of substrates may be inspected at various points in the fabrication process to generate spectra data. The spectra data can be used to generate data that are input to a machine learning model to predict yields for the substrates.