The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Mar. 18, 2022
Kenichi Ohno, Sunnyvale, CA (US);
Takashi Kuratomi, San Jose, CA (US);
Fariah Hayee, San Jose, CA (US);
Andrew Ceballos, Palo Alto, CA (US);
Rami Hourani, Santa Clara, CA (US);
Ludovic Godet, Sunnyvale, CA (US);
Kenichi Ohno, Sunnyvale, CA (US);
Takashi Kuratomi, San Jose, CA (US);
Fariah Hayee, San Jose, CA (US);
Andrew Ceballos, Palo Alto, CA (US);
Rami Hourani, Santa Clara, CA (US);
Ludovic Godet, Sunnyvale, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
A method of forming an optical device is provided. The method includes disposing an optical device substrate on a substrate support in a process volume of a process chamber, the optical device substrate having a first surface; and forming a first optical layer on the first surface of the optical device substrate during a first time period when the optical device substrate is on the substrate support, wherein the first optical layer comprises one or more metals in a metal-containing oxide, a metal-containing nitride, or a metal-containing oxynitride, and the first optical layer is formed without an RF-generated plasma over the optical device substrate; and forming a second optical layer with an RF-generated plasma over the first optical layer during a second time period when the optical device substrate is on the substrate support.