The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 01, 2024

Filed:

Jan. 12, 2022
Applicant:

Stmicroelectronics, Inc., Coppell, TX (US);

Inventor:

John H. Zhang, Altamont, NY (US);

Assignee:

STMICROELECTRONICS, INC., Coppell, TX (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/45 (2006.01); H01L 21/265 (2006.01); H01L 21/66 (2006.01); H01L 21/8238 (2006.01); H01L 29/41 (2006.01); H01L 29/66 (2006.01); H01L 29/775 (2006.01); H01L 29/778 (2006.01); H01L 29/10 (2006.01); H01L 29/165 (2006.01); H01L 29/417 (2006.01); H01L 29/423 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66492 (2013.01); H01L 21/26513 (2013.01); H01L 21/823814 (2013.01); H01L 22/12 (2013.01); H01L 29/413 (2013.01); H01L 29/456 (2013.01); H01L 29/66431 (2013.01); H01L 29/66666 (2013.01); H01L 29/775 (2013.01); H01L 29/7781 (2013.01); H01L 21/823842 (2013.01); H01L 29/1054 (2013.01); H01L 29/165 (2013.01); H01L 29/41766 (2013.01); H01L 29/4236 (2013.01); H01L 29/4975 (2013.01); H01L 2924/0002 (2013.01);
Abstract

Incorporation of metallic quantum dots (e.g., silver bromide (AgBr) films) into the source and drain regions of a MOSFET can assist in controlling the transistor performance by tuning the threshold voltage. If the silver bromide film is rich in bromine atoms, anion quantum dots are deposited, and the AgBr energy gap is altered so as to increase V. If the silver bromide film is rich in silver atoms, cation quantum dots are deposited, and the AgBr energy gap is altered so as to decrease V. Atomic layer deposition (ALD) of neutral quantum dots of different sizes also varies V. Use of a mass spectrometer during film deposition can assist in varying the composition of the quantum dot film. The metallic quantum dots can be incorporated into ion-doped source and drain regions. Alternatively, the metallic quantum dots can be incorporated into epitaxially doped source and drain regions.


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