The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Mar. 15, 2022
Applicant:
Inficon, Inc., East Syracuse, NY (US);
Inventors:
Assignee:
Inficon, Inc., East Syracuse, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/14 (2006.01); G01N 27/64 (2006.01); G01N 30/72 (2006.01); H01J 49/00 (2006.01);
U.S. Cl.
CPC ...
H01J 49/147 (2013.01); G01N 27/64 (2013.01); G01N 30/7206 (2013.01); H01J 49/0031 (2013.01); H01J 49/145 (2013.01);
Abstract
A wide-range ion source for a mass spectrometer comprises a first portion and a second portion that is positioned downstream of the first portion. The first portion includes an anode and a first filament that is positioned proximate the anode and secured in place relative to the anode. The first filament is exposed to a pressure of a process chamber. A first electron repeller has at least a partially circular shape. The second portion includes a tubular anode, a second filament surrounding the tubular anode, an extraction lens defining an opening and a focus lens to conduct ions into a volume.