The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
May. 25, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Jay R. Wallace, Danvers, MA (US);
Simon Ruffell, South Hamilton, MA (US);
Kevin R. Anglin, Somerville, MA (US);
Tyler Rockwell, Wakefield, MA (US);
Christopher Campbell, Newburyport, MA (US);
Kevin M. Daniels, Lynnfield, MA (US);
Richard J. Hertel, Boxford, MA (US);
Kevin T. Ryan, Wilmington, MA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate holder assembly including a substrate platen, the substrate platen disposed to support a substrate at a substrate position, a halo ring, the halo ring being disposed around the substrate position, and an outer halo being disposed around the halo ring and defining a first aperture, wherein the outer halo is disposed to engage the halo ring, the halo ring being disposed at least partially within the first aperture, the halo ring defining a second aperture, concentrically positioned within the first aperture, wherein the outer halo and the halo ring are formed at least partially of silicon, silicon carbide, doped silicon, quartz, and ceramic.