The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Sep. 08, 2022
Applicant:
Kla Corporation, Milpitas, CA (US);
Inventor:
Alberto Cagliani, Copenhagen, DK;
Assignee:
KLA CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2020.01); G01R 1/073 (2006.01);
U.S. Cl.
CPC ...
G01R 31/2648 (2013.01); G01R 1/073 (2013.01); G01R 31/2601 (2013.01); G01R 31/2607 (2013.01);
Abstract
The multilayer test sample includes a stack with a bottom layer, a top layer, and a tunnel layer sandwiched between the bottom and top layers. The multilayer test sample has terminals below the stack for measuring on the stack. The terminals have unknown positions or distance between them. A model and a measurement strategy is defined so that material parameters of the stack may be determined.