The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Sep. 25, 2023
Auros Technology, Inc., Hwaseong-si, KR;
Sang Jun Kim, Hwaseong-si, KR;
Dae Won Kwon, Hwaseong-si, KR;
AUROS Technology, Inc., Hwaseong-si, KR;
Abstract
A method of quality control and testing for manufactured semiconductors by generating a model for spectroscopic ellipsometry constant analysis includes: calculating, by an operator, simulation data representing a spectroscopic ellipsometry constant of an analysis target through reasoning on attribute data representing an attribute of the analysis target using a simulation model; calculating, by an error calculator, an error representing a difference between actual measured data obtained by measuring the spectroscopic ellipsometry constant of the analysis target and the simulation data; and performing optimization in which an optimizer modifies a parameter of the simulation model according to the error.