The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Aug. 30, 2021
Applicant:
Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;
Inventors:
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 15/06 (2024.01); G01N 15/02 (2006.01); G01N 15/08 (2006.01); G01N 15/10 (2006.01); G01N 35/00 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
G01N 15/0656 (2013.01); G01N 15/02 (2013.01); G01N 15/06 (2013.01); G01N 15/0826 (2013.01); G01N 15/10 (2013.01); G01N 35/00584 (2013.01); G01N 35/0099 (2013.01); B25J 11/00 (2013.01); G01N 2015/0662 (2013.01); G01N 2015/084 (2013.01); G01N 2015/1024 (2024.01);
Abstract
A system and a method for testing a filter used in ultrapure water are provided. The method for testing a filter, which is used for removing particles from ultrapure water, comprises: providing a testing solution with particles; detecting the particles in the testing solution by a particle counter; passing the testing solution through a filter; and detecting the particles in the testing solution, which is passed through the filter, by another particle counter.