The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Apr. 21, 2021
Applicant:
Tamura Corporation, Tokyo, JP;
Inventor:
Kohei Sasaki, Tokyo, JP;
Assignee:
TAMURA CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/321 (2006.01); C30B 29/16 (2006.01); C30B 33/00 (2006.01);
U.S. Cl.
CPC ...
C30B 29/16 (2013.01); C30B 33/00 (2013.01);
Abstract
Provided is a GaO-based single crystal substrate capable of achieving a high processing yield. A GaO-based single crystal substrate having a crack density of less than 0.05 cracks/cm can be obtained that has as a principal surface thereof a surface rotated 10-150° from the (100) plane, when a rotation direction from the (100) plane to the (001) plane via the (101) plane is defined as positive, having the [010] axis as the rotation axis.