The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Sep. 27, 2022
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Charles Dezelah, Helsinki, FI;
Timothee Blanquart, Oud-Heverlee, BE;
René Henricus Jozef Vervuurt, Leuven, BE;
Viljami Pore, Helsinki, FI;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/04 (2006.01); C23C 16/08 (2006.01); C23C 16/513 (2006.01); C23C 16/56 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C23C 16/045 (2013.01); C23C 16/08 (2013.01); C23C 16/513 (2013.01); C23C 16/56 (2013.01); H01L 21/28556 (2013.01);
Abstract
Disclosed are methods and systems for filling a gap. An exemplary method comprises providing a substrate to a reaction chamber. The substrate comprises the gap. The method further comprises forming a convertible layer on the substrate and exposing the substrate to a conversion reactant. Accordingly, at least a part of the convertible layer is converted into a gap filling fluid. The gap filling fluid at least partially fills the gap. The methods and systems are useful, for example, in the field of integrated circuit manufacture.