The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Aug. 12, 2022
Jeol Ltd., Tokyo, JP;
Tatsuo Naruse, Tokyo, JP;
Takayuki Shimizu, Tokyo, JP;
JEOL Ltd., Tokyo, JP;
Abstract
A vacuum pump that evacuates an inside of a vacuum chamber and powder capturing devices disposed on an intake side of the vacuum pump are included. The powder capturing devices include a plurality of flow path forming units that form a continuous gas flow path from an intake unit located on the vacuum chamber side to an exhaust unit located on the vacuum pump side. The plurality of flow path forming units include a first flow path forming unit having a first catching unit that causes the powder sucked from the intake unit to collide and then catch the powder, and a second flow path forming unit having a second catching unit that causes the powder passing through the first flow path forming unit to collide and then catch the powder.