The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2024
Filed:
Apr. 05, 2023
Entegris, Inc., Billerica, MA (US);
Yuxuan Liu, Wayland, MA (US);
Zhifeng Li, Acton, MA (US);
Carlo Waldfried, Middleton, MA (US);
Yan Liu, Lexington, MA (US);
Chandra Venkatraman, Tyngsboro, MA (US);
Pushkara Rao Varanasi, Poughkeepsie, NY (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
A conductive polymeric layer on an electrostatic chuck. The conductive polymeric layer comprises a conductive polymer and a photosensitive polymer. The conductivity of the conductive polymer promotes charge dissipation by the conductive polymeric layer, while the photosensitivity of the photosensitive polymer allows the surface of the conductive polymeric layer to be photopatterned. The extent to which the conductive polymeric layer is conductive and photosensitive may be modulated by varying the relative amounts of the conductive polymer and the photosensitive polymer.