The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2024
Filed:
Jul. 06, 2020
Merck Patent Gmbh, Darmstadt, DE;
M. Dalil Rahman, Monmouth Junction, NJ (US);
Salem Mullen, Florham Park, NJ (US);
JoonYeon Cho, Gyeonggi-do, KR;
Merck Patent GmbH, Darmstadt, DE;
Abstract
The disclosed subject matter relates to a rinse and methods of use thereof for removing an edge protection layer and residual hardmask components (e.g., metals) from the edge and at least one proximate surface of a wafer/substrate where the rinse includes acetic acid and/or a halogenated acetic acid of structure (A) wherein Rand Rare independently hydrogen or a halogen and Ris a halogen and (ii) a compound having structure (B) wherein each of R, R, R, R, R, R, Rand Rh may independently be hydrogen, a substituted or an unsubstituted alkyl group, a substituted or an unsubstituted halogenated alkyl group, a substituted or an unsubstituted alkyl carbonyl group, a halogen, and a hydroxy group.